@article {staudacher_09_selbstadaptivitaet,
	title = {Self Adjustment of Scanning Electron Microscopes / Selbstadaptivit{\"a}t von Rasterelektronenmikroskopen},
	journal = {Patent, Patent Number  WO2009062781A1},
	year = {2009},
	author = {Staudacher, M. and Fred A. Hamprecht and G{\"o}rlitz, L.}
}
