@article {staudacher_09_selbstadaptivitaet, title = {Self Adjustment of Scanning Electron Microscopes / Selbstadaptivit{\"a}t von Rasterelektronenmikroskopen}, journal = {Patent, Patent Number WO2009062781A1}, year = {2009}, author = {Staudacher, M. and Fred A. Hamprecht and G{\"o}rlitz, L.} }